Chairperson: S. Goodnick

	08:30	Welcome H. Kosina and S. Selberherr
	08:45	Calculating Future CMOS and CMOS Future - Where Industry Needs Academia (Invited) T. Skotnicki STMicroelectronics, France
	09:15	A Novel Approach to Three-Dimensional Semiconductor Process Simulation: Application to Thermal Oxidation V. Suvorov, A. Hössinger, and Z. Djuric Silvaco Technology Center, United Kingdom
	09:30	A 3D Moving Grid Algorithm for Process Simulation N. Strecker and D. Richards Synopsys Inc., USA
	09:45	Kinetic-Energy Transport Equation for the Modeling of Ballistic MOSFETs T.-W. Tang and P. Samra University of Massachusetts, Amherst, USA
	10:00	Multi-Dimensional Semiconductor Tunneling in Density-Gradient Theory M. Ancona Naval Research Laboratory, USA